Title Short Channel (L = 1.5 um) ELO MOSFET with Nsub = 1e15
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$ * * * A : define rectangular grid * * * 
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mesh    rectangular nx=38 ny=23 outf=nmeshe.msh
x.m     n=1     l=0     r=1
x.m     n=4     l=0.50  r=.7
x.m     n=8     l=0.70  r=.75
x.m     n=15    l=0.95  r=1.25
x.m     n=24    l=2.05  r=1.0
x.m     n=31    l=2.30  r=.8
x.m     n=35    l=2.50  r=1.33
x.m     n=38    l=3.00  r=1.40
y.m     n=1     l=-.035 r=1
y.m     n=4     l=0     r=1
y.m     n=9     l=0.10  r=1.25
y.m     n=16    l=0.50  r=1.15
y.m     n=23    l=2.0   r=1.25
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$ * * * eliminate * * *
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elim    ix.lo=13 ix.hi=26 iy.lo=21 iy.hi=23 y.dir
elim    ix.lo=1  ix.hi=38 iy.lo=21 iy.hi=23 y.dir
elim    ix.lo=5  ix.hi=13 iy.lo=21 iy.hi=23 y.dir
elim    ix.lo=25 ix.hi=33 iy.lo=21 iy.hi=23 y.dir
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$ * * * distort * * *
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spread  left w=0.70 up=4  lo=16 y.lo=0.5 en=1.2 gr1=1.3
+       gr2=.5 mid=13 y.mid=0.35
spr     righ w=0.70 up=4  lo=16 y.lo=0.5 en=1.2 gr1=1.3
+       gr2=.5 mid=10 y.mid=0.3
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$ * * * regions * * *
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region	num=1 ix.l=1  ix.h=38 iy.l=1  iy.h=4  oxide
region	num=2 ix.l=1  ix.h=38 iy.l=4  iy.h=9  silicon
region	num=3 ix.l=1  ix.h=2  iy.l=9  iy.h=20 oxide
region	num=2 ix.l=2  ix.h=4  iy.l=9  iy.h=20 silicon
region	num=3 ix.l=4  ix.h=35 iy.l=9  iy.h=20 oxide
region	num=2 ix.l=35 ix.h=37 iy.l=9  iy.h=20 silicon
region	num=3 ix.l=37 ix.h=38 iy.l=9  iy.h=20 oxide
region	num=4 ix.l=1  ix.h=38 iy.l=20 iy.h=23 silicon
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$ * * * electrodes * * * 
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elec	num=1	ix.l=4	ix.h=35	iy.l=1	iy.h=1
elec	num=2	ix.l=1	ix.h=38	iy.l=23	iy.h=23
elec	num=3	ix.l=1	ix.h=3	iy.l=4	iy.h=4
elec	num=4	ix.l=36	ix.h=38	iy.l=4	iy.h=4
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$ * * * doping and fixed charge * * *
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dop 	reg=2 unif conc=1e15 p.type
dop 	reg=2 n.type gaussian x.right=.5 ratio.lateral=.8
+       conc=2e19 junction=.1
dop 	reg=2 n.type gaussian x.left=2.5 ratio.lateral=.8
+       conc=2e19 junction=.1
dop 	reg=4 unif conc=1e15 p.type
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$contact num=1 n.poly
$....Plot grid
$options plotdev=stout
$plot.2d grid bound no.fill no.tic
$plot.2d no.top bound junction
$contour doping abs log min=10 max=20 del=2
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end
